Dische minc's profile
ID: 7465
December 10, 2021
Description
Negative tone electron beam resist one of two types of the electron beam (EB) resist (the other being positive tone EB resist). The main distinction between negative and positive tone is that the resistance of negative tone
decreases gradually with temperature throughout the post-development bake, with no sudden change. Negative tone electron beam resist is also more susceptible to ionizing radiation than positive tone, making mask
manufacturing more favorable.
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