Photolithography And Electron Beam Lithography
- Location: Suite A PO Box 267 Ridgway, PA 15853 USA, Ridgway, Pennsylvania, United States
Electron beam lithography shares the same purpose as photolithography. They create very small structures in the resist, which are then transferred to the substrate material by etching. In this article, we'll be looking at the processes involved with photolithography and electron beam lithography.
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